Automatic registration coating development baking device "LITHOTRAC series"
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This series is a resist coating, developing, and baking device that can be adapted to all areas related to semiconductor manufacturing processes, from research and development applications to production applications. It features a highly flexible design, making it ideal for both research and development as well as mass production specifications. Additionally, it is equipped with a coating unit and a developing unit, allowing for easy switching between 2” and 8” wafers. 【Features】 ■ Highly flexible design ■ Equipped with coating unit and developing unit ■ Capable of supporting mass production specifications *For more details, please refer to the catalog or feel free to contact us.
- Company:リソテックジャパン
- Price:Other